What semiconductor components do you machine?

We manufacture UHV vacuum chamber components, RF connector housings, electrode assemblies, gas distribution parts, and precision fixturing.

What materials are used in semiconductor CNC machining?

Stainless 316L, Aluminum 6061-T6, OFHC Copper, PEEK, PTFE, and Ceramic-grade materials for cleanroom compatibility.

What surface finishes do you achieve?

Standard Ra 0.8μm, with Ra 0.4μm achievable on critical sealing surfaces. Electropolishing available for UHV applications.

Do you work with UHV-compatible parts?

Yes. We routinely machine parts with helium leak testing <1×10⁻⁹ mbar·L/s and certified cleanroom packaging.

What tolerances for semiconductor parts?

Typical tolerances at ±0.01mm, with critical features at ±0.005mm. Full dimensional reports provided with each shipment.

Industry

Semiconductor CNC Precision Machining | UHV Parts

Q: What tolerances for semiconductor parts?

Typical tolerances at ±0.01mm, with critical features at ±0.005mm. Full dimensional reports provided with each shipment.

High-precision CNC machining for the semiconductor industry. Vacuum chamber fittings, gas distribution components, electrode assemblies, wafer handling tooling, and instrumentation hardware. UHV-compatible materials, ESD-safe finishing, controlled manufacturing environment.

🔥 3-8 week lead timeStainless 316LAluminum 6061PEEK/PTFEUHV CompatibleHelium Leak Test

Typical Parts We Machine

Vacuum chamber fittings and flanges — stainless 316L, helium leak-tested
Gas distribution manifold blocks — stainless, electropolished channels
Electrode and RF components — OFHC copper, precision-machined
Wafer handling tooling — PEEK, ceramic-compatible, ESD-safe
Sensor and probe mounts — aluminum, stainless, UHV-compatible
Cooling plate assemblies — aluminum, OFHC copper, flat to 0.01mm
Shielding and baffle components — aluminum, EDM finish
Custom retrofit parts — reverse-engineered to OEM spec

Materials

Stainless 304L, 316L (low sulfur); Aluminum 6061-T6, 5083; OFHC Copper C101; PEEK (ESD-safe grade); PTFE; Titanium Grade 2. Materials selected for UHV compatibility (low outgassing, non-magnetic).

Quality

Every part 100% dimensionally inspected. Helium leak testing on vacuum components. Surface roughness measurement. Parts cleaned and packaged in controlled environment. Dimensional report included. ESD-safe packaging available.

Standards & Certifications

Class 1000 Cleanroom-CompatibleHelium Leak Test (1×10⁻⁹ Pa·m³/s)ESD-Safe HandlingUHV Outgassing < 1% AMU 28SEMI S2/S8 CompatibleRaw Material PMI Verification

Related Industries

These precision machining tracks share similar processes, materials, and quality standards.

Frequently Asked Questions

Do you offer helium leak testing?

Yes. Helium leak testing to 1×10⁻⁹ Pa·m³/s on all vacuum components. Both vacuum and pressure methods available. Test report included with every part.

What materials are suitable for UHV applications?

304L/316L low-sulfur stainless, 5083 aluminum, OFHC copper, titanium Grade 2, and select PEEK grades. We select materials for low outgassing, non-magnetic properties, and corrosion resistance.

Can you hold ESD-safe requirements?

Yes. ESD-safe handling and packaging available for sensitive semiconductor components. We can machine ESD-safe PEEK and other static-dissipative materials to customer specifications.

What is the maximum part size?

Our 5-axis CNC mills handle parts up to 2000×1000×500mm. For smaller precision components, our turning centers achieve ±0.005mm on diameters up to 300mm.

Do you offer electropolishing on gas path components?

Yes. Electropolishing available on stainless gas distribution components to achieve Ra < 0.4μm with improved corrosion resistance. Suitable for high-purity gas systems.

Can you reverse-engineer legacy semiconductor parts?

Yes. We can reverse-engineer discontinued or legacy OEM parts from physical samples. 3D scanning available for complex geometries. Parts matched to original form, fit, and function.