🔬 UHV Vacuum Fittings

We machine 316L/304L stainless steel (low magnetic permeability, vacuum-compatible), high-purity aluminum 5083/6061, oxygen-free copper (OFHC C10100), titanium Grade 2, and Inconel 625/718 for UHV components. All materials are selected to minimize outgassing and are certified vacuum-grade per customer specification.

UHV sealing surfaces require Ra 0.2µm (mirror finish) for metal gasket sealing (ConFlat/CF flanges) and Ra 0.8µm for elastomer/copper gasket sealing. We achieve these finishes through precision turning, grinding, and optional lapping/polishing. All sealing surfaces are verified with profilometer and documented.

Yes. We machine standard and custom ConFlat flanges per ISO 3669 / DIN 28403, with the critical knife-edge sealing surface held to ±0.05mm knife-edge radius and the proper 20° sealing angle. All CF flanges are dimensionally verified with optical measurement to ensure leak-tight sealing with OFHC copper gaskets.

Vacuum components machined by TruPart consistently achieve leak rates below 1×10⁻¹⁰ mbar·L/s (helium leak testing). Our typical UHV components can reach 1×10⁻¹² mbar·L/s with appropriate sealing hardware. Leak test reports are available upon request.

We offer electropolishing for 316L UHV components to remove surface impurities, reduce outgassing, and achieve Ra 0.25µm surface finish. Passivation per ASTM A967 is standard for stainless steel components. For aluminum UHV parts, we offer fluoropolymer coating to reduce particulate generation in vacuum.

Yes. We machine custom UHV feedthrough bodies, viewport flanges, electrical feedthroughs, and liquid feedthroughs. These components require extremely tight dimensional control for hermetic glass-to-metal seal (GTMS) and ceramic-to-metal seal integrity. We work from customer-supplied GTMS drawings or provide design assistance for the metal housing geometry.